Daim ntawv thov ntawmHafnium tetrachloride hmoov(HfCl₄) nyob rau hauv semiconductor manufacturing yog mas concentrated nyob rau hauv kev npaj ntawm siab dielectric tas li (high-k) cov ntaub ntawv thiab tshuaj vapor deposition (CVD) txheej txheem. Cov hauv qab no yog nws cov kev siv tshwj xeeb:
Kev npaj cov khoom siv siab dielectric tas li
Tom qab: Nrog kev txhim kho ntawm cov tshuab semiconductor, qhov loj ntawm cov transistors txuas ntxiv zuj zus, thiab cov tsoos silicon dioxide (SiO₂) rooj vag rwb thaiv tsev txheej yog maj mam ua tsis tau raws li cov kev xav tau ntawm cov khoom siv semiconductor siab vim muaj teeb meem to. High dielectric tas li cov ntaub ntawv tuaj yeem ua rau kom muaj peev xwm ceev ntawm transistors, yog li txhim kho kev ua haujlwm ntawm cov khoom siv.
Daim ntawv thov: Hafnium tetrachloride yog ib qho tseem ceeb ua ntej rau kev npaj cov khoom siv high-k (xws li hafnium dioxide, HfO₂). Thaum lub sij hawm kev npaj, hafnium tetrachloride hloov mus rau hauv hafnium dioxide zaj duab xis los ntawm cov tshuaj tiv thaiv. Cov yeeb yaj kiab no muaj cov khoom zoo heev dielectric thiab tuaj yeem siv los ua rooj vag rwb thaiv tsev txheej ntawm transistors. Piv txwv li, nyob rau hauv lub deposition ntawm high-k rooj vag dielectric HfO₂ ntawm MOSFET (hlau-oxide-semiconductor teb-effect transistor), hafnium tetrachloride yuav siv tau raws li cov kev taw qhia roj ntawm hafnium.
Chemical Vapor Deposition (CVD) Txheej txheem
Tom qab: Tshuaj vapor deposition yog ib tug nyias zaj duab xis deposition tshuab lug siv nyob rau hauv semiconductor manufacturing, uas tsim ib tug nyias nyias zaj duab xis nyob rau saum npoo ntawm substrate los ntawm cov tshuaj tiv thaiv.
Daim ntawv thov: Hafnium tetrachloride yog siv los ua tus thawj coj hauv CVD txheej txheem los tso cov hlau hafnium lossis hafnium compound films. Cov yeeb yaj kiab no muaj ntau yam siv hauv cov khoom siv semiconductor, xws li kev tsim cov khoom siv hluav taws xob zoo, nco, thiab lwm yam. Piv txwv li, hauv qee qhov kev tsim khoom semiconductor siab heev, hafnium tetrachloride tau tso rau saum npoo ntawm silicon wafers los ntawm CVD txheej txheem los tsim cov yeeb yaj kiab zoo hafnium, uas yog siv los txhim kho cov khoom siv hluav taws xob.
Qhov tseem ceeb ntawm Purification Technology
Keeb kwm: Hauv kev tsim khoom semiconductor, purity ntawm cov khoom muaj feem cuam tshuam rau kev ua haujlwm ntawm lub cuab yeej. High-purity hafnium tetrachloride tuaj yeem ua kom zoo thiab ua haujlwm ntawm cov yeeb yaj kiab tso.
Daim ntawv thov: Yuav kom ua tau raws li cov kev cai ntawm high-end chip manufacturing, purity ntawm hafnium tetrachloride feem ntau yuav tsum tau mus txog ntau tshaj 99.999%. Piv txwv li, Jiangsu Nanda Optoelectronic Materials Co., Ltd. tau txais patent rau kev npaj ntawm semiconductor-qib hafnium tetrachloride, uas siv cov txheej txheem high-vacuum decompression sublimation los ntxuav cov khoom hafnium tetrachloride kom huv si kom huv si ntawm cov khoom sau hafnium ntau dua 9%. Qhov no high-purity hafnium tetrachloride tuaj yeem ua tau raws li qhov yuav tsum tau ua ntawm 14nm txheej txheem thev naus laus zis.
Daim ntawv thov ntawm hafnium tetrachloride hauv kev tsim khoom semiconductor tsis tsuas yog txhawb kev txhim kho ntawm cov khoom siv hluav taws xob semiconductor, tab sis kuj tseem muab cov khoom siv tseem ceeb rau kev tsim cov tshuab semiconductor ntau dua yav tom ntej. Nrog rau kev nce qib ntawm kev siv tshuab semiconductor tas mus li, qhov yuav tsum tau ua rau purity thiab zoo ntawm hafnium tetrachloride yuav ua rau siab dua thiab siab dua, uas yuav txhawb nqa kev txhim kho ntawm kev ua kom huv si.
| Khoom npe | Hafnium tetrachloride |
| CAS | 13499-05-3 |
| Compound Formula | HfCl4 |
| Molecular Luj | 320.3 ib |
| Qhov tshwm sim | Dawb hmoov |
Lub purity ntawm hafnium tetrachloride cuam tshuam li cas rau cov khoom siv semiconductor?
Lub purity ntawm hafnium tetrachloride (HfCl ₄) muaj qhov cuam tshuam tseem ceeb ntawm kev ua haujlwm thiab kev ntseeg siab ntawm cov khoom siv semiconductor. Hauv kev tsim khoom semiconductor, high-purity hafnium tetrachloride yog ib qho tseem ceeb los xyuas kom meej cov cuab yeej ua tau zoo thiab zoo. Cov hauv qab no yog cov teebmeem tshwj xeeb ntawm hafnium tetrachloride purity ntawm cov khoom siv semiconductor:
1. cuam tshuam rau qhov zoo thiab kev ua haujlwm ntawm cov yeeb yaj kiab nyias
Kev sib xyaw thiab qhov ceev ntawm cov yeeb yaj kiab nyias nyias: High-purity hafnium tetrachloride tuaj yeem tsim cov yeeb yaj kiab thiab ntom duab hluav taws xob (CVD). Yog hais tias hafnium tetrachloride muaj impurities, cov impurities no yuav tsim cov teeb meem los yog qhov thaum lub sij hawm deposition txheej txheem, uas ua rau ib tug txo nyob rau hauv lub uniformity thiab ceev ntawm cov zaj duab xis. Piv txwv li, impurities yuav ua rau tsis sib xws ntawm cov yeeb yaj kiab, cuam tshuam rau cov khoom siv hluav taws xob.
Dielectric zog ntawm nyias zaj duab xis: Thaum npaj siab dielectric tas li cov ntaub ntawv (xws li hafnium dioxide, HfO₂), purity ntawm hafnium tetrachloride ncaj qha cuam tshuam rau dielectric zog ntawm cov zaj duab xis. High-purity hafnium tetrachloride tuaj yeem ua kom ntseeg tau tias cov zaj duab xis tso tawm hafnium dioxide muaj lub siab dielectric tas li, tsis tshua muaj hluav taws xob tam sim no thiab cov khoom zoo rwb thaiv tsev. Yog hais tias hafnium tetrachloride muaj hlau impurities los yog lwm yam impurities, nws yuav ua kom paub ntxiv cov cuab yeej, ua kom cov dej ntws tam sim no, thiab txo cov dielectric zog ntawm cov yeeb yaj kiab.
2. cuam tshuam cov khoom hluav taws xob ntawm lub cuab yeej
Cov dej xau tam sim no: qhov siab dua qhov purity ntawm hafnium tetrachloride, lub purer lub deposited zaj duab xis, thiab qhov me dua qhov to tam sim no. Qhov loj ntawm cov dej ntws ncaj qha cuam tshuam rau kev siv hluav taws xob thiab kev ua haujlwm ntawm cov khoom siv semiconductor. High-purity hafnium tetrachloride tuaj yeem txo qhov ntws tawm tam sim no, yog li txhim kho lub zog ua haujlwm thiab kev ua haujlwm ntawm lub cuab yeej.
Kev tawg hluav taws xob: Lub xub ntiag ntawm impurities yuav txo qhov tawg ntawm cov yeeb yaj kiab, ua rau lub cuab yeej yooj yim dua puas tsuaj nyob rau hauv high voltage. High-purity hafnium tetrachloride tuaj yeem ua rau kom muaj zog tawg ntawm zaj duab xis thiab txhim khu kev ntseeg tau ntawm lub cuab yeej.
3. cuam tshuam rau kev ntseeg siab thiab lub neej ntawm lub cuab yeej
Thermal stability: High-purity hafnium tetrachloride tuaj yeem ua kom zoo thermal stability nyob rau hauv qhov kub thiab txias, tsis txhob thermal decomposition los yog theem hloov los ntawm impurities. Qhov no yuav pab txhim kho kev ruaj ntseg thiab lub neej ntawm cov cuab yeej nyob rau hauv qhov kub thiab txias ua haujlwm.
Chemical stability: Impurities tej zaum yuav hnov mob chemically nrog cov ntaub ntawv nyob ib puag ncig, ua rau txo cov tshuaj stability ntawm lub cuab yeej. High-purity hafnium tetrachloride tuaj yeem txo qhov tshwm sim ntawm cov tshuaj tiv thaiv no, yog li txhim kho kev ntseeg siab thiab lub neej ntawm lub cuab yeej.
4. Kev cuam tshuam rau kev tsim khoom ntawm cov khoom siv
Txo qhov tsis xws luag: High-purity hafnium tetrachloride tuaj yeem txo qhov tsis xws luag hauv cov txheej txheem tso nyiaj thiab txhim kho cov yeeb yaj kiab zoo. Qhov no pab txhim kho kev tsim khoom ntawm cov khoom siv semiconductor thiab txo cov nqi tsim khoom.
Txhim kho qhov sib xws: High-purity hafnium tetrachloride tuaj yeem xyuas kom meej tias cov khoom sib txawv ntawm cov yeeb yaj kiab muaj kev ua tau zoo ib yam, uas yog qhov tseem ceeb rau kev tsim khoom loj ntawm cov khoom siv semiconductor.
5. Kev cuam tshuam rau cov txheej txheem siab heev
Ua tau raws li qhov yuav tsum tau ua ntawm cov txheej txheem siab heev: Raws li cov txheej txheem tsim khoom semiconductor txuas ntxiv txhim kho rau cov txheej txheem me, cov kev xav tau purity rau cov ntaub ntawv kuj tau nce siab dua. Piv txwv li, cov khoom siv hluav taws xob semiconductor nrog cov txheej txheem ntawm 14nm thiab hauv qab no feem ntau xav tau ib qho purity ntawm hafnium tetrachloride ntau dua 99.999%. High-purity hafnium tetrachloride tuaj yeem ua tau raws li cov khoom siv nruj ntawm cov txheej txheem siab heev thiab ua kom cov cuab yeej ua tau zoo ntawm kev ua haujlwm siab, kev siv hluav taws xob tsawg thiab kev ntseeg siab.
Txhawb nqa kev kawm txuj ci: High-purity hafnium tetrachloride tuaj yeem tsis tsuas yog ua tau raws li cov kev xav tau tam sim no ntawm kev tsim khoom semiconductor, tab sis kuj tseem muab cov ntaub ntawv tseem ceeb rau kev tsim cov tshuab semiconductor ntau dua yav tom ntej.
Lub purity ntawm hafnium tetrachloride muaj qhov cuam tshuam tseem ceeb ntawm kev ua haujlwm, kev ntseeg tau thiab lub neej ntawm cov khoom siv semiconductor. High-purity hafnium tetrachloride tuaj yeem ua kom zoo thiab ua haujlwm ntawm cov yeeb yaj kiab, txo cov xau tam sim no, ua kom tawg hluav taws xob, txhim kho thermal stability thiab tshuaj lom neeg ruaj khov, yog li txhim kho tag nrho cov kev ua tau zoo thiab kev ntseeg siab ntawm cov khoom siv semiconductor. Nrog rau kev nce qib txuas ntxiv ntawm kev tsim khoom siv tshuab semiconductor, cov kev xav tau rau kev ua kom huv huv ntawm hafnium tetrachloride yuav dhau los ua ntau dua, uas yuav txhawb nqa kev txhim kho ntawm cov cuab yeej ua kom huv huv.
Post lub sij hawm: Apr-22-2025